Height profile measurement by means of white light interferometry

Number of the records: 1

SYSNO ASEP	0100119
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Height profile measurement by means of white light interferometry
Title	Měření výškového profilu pomocí interferometrie v bílém světle
Author(s)	Pavlíček, Pavel (FZU-D)_{RID, ORCID, SAI}
Source Title	Wave and Qantum Aspects of Contemporary Optics. - Washington : SPIE The International Society for Optical Engineering, 2003 / Zajac M. ; Masajada J. - ISSN 0277-786X - ISBN 0-8194-5146-0
Pages	s. 139-144
Number of pages	6 s.
Action	Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics /13./
Event date	09.09.2002-13.09.2002
VEvent location	Krzyzowa
Country	PL - Poland
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	white-light interferometry ; height profile ; rough surface ; speckle pattern
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z1010921 - FZU-D
Annotation	White-light interferometry allows to measure the height profile of smooth as well as of rough surface. A very low measurement uncertainty is independent on the measurement range, the ambiguity problem does not occur
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2005

Number of the records: 1