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Height profile measurement by means of white light interferometry

  1. 1.
    Pavlíček, Pavel
    Height profile measurement by means of white light interferometry.
    Wave and Qantum Aspects of Contemporary Optics. Washington: SPIE The International Society for Optical Engineering, 2003 - (Zajac, M.; Masajada, J.), s. 139-144. SPIE - The International Society for Optical Engineering., 5259. ISBN 0-8194-5146-0. ISSN 0277-786X.
    [Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics /13./. Krzyzowa (PL), 09.09.2002-13.09.2002]
    R&D Projects: GA MŠMT LN00A015
    http://hdl.handle.net/11104/0007625

Number of the records: 1  

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