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Why is it That Differently Doped Regions in Semiconductors are Visible in Low Voltage SEM?

  1. 1.
    El Gomati, M. M. - Wells, T. C. R. - Müllerová, Ilona - Frank, Luděk - Jayakody, H.
    Why is it That Differently Doped Regions in Semiconductors are Visible in Low Voltage SEM?
    IEEE Transactions on Electron Devices. Roč. 51, č. 2 (2004), s. 288-292. ISSN 0018-9383. E-ISSN 1557-9646
    R&D Projects: GA AV ČR IAA1065304
    Impact factor: 2.036, year: 2004
    http://hdl.handle.net/11104/0007514
Number of the records: 1  

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