Signal Processing of Secondary Electron Images in SEM

Number of the records: 1

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SYSNO ASEP	0092205
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Signal Processing of Secondary Electron Images in SEM
Title	Článek charakterizuje způsoby zavedení rastrovací verze LEEM do konvenčního SEM prostřednictvím vložení katodové čočky pod objektiv přístroje. Shrnuty jsou základní vlastnosti rastrovacího LEEMu
Author(s)	Novák, Libor (UPT-D) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 8th Multinational Congress on Microscopy. - Prague : Czechoslovak Microscopy Society, 2007 / Nebesářová Jana ; Hozák Pavel - ISBN 978-80-239-9397-4
Pages	s. 99-100
Number of pages	2 s.
Action	Multinational Congress on Microscopy /8./
Event date	17.06.2007-21.06.2007
VEvent location	Prague
Country	CZ - Czech Republic
Event type	EUR
Language	eng - English
Country	CZ - Czech Republic
Keywords	signal processing ; secondary electron images ; SEM
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GA102/05/2327 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	Procedure of signal processing in the Everhart-Thornley type of the secondary electron detector in the SEM is analyzed as regards signal statistics, detective quantum efficiency and transport and possible losses of information.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2008

Number of the records: 1