0049019 - ÚPT 2007 RIV CZ eng C - Conference Paper (international conference)
Novák, Libor - Müllerová, Ilona
Processing of Signal in the Everhart-Thornley Detector.
[Zpracování signálu Everhart-Thornleyho detektorem.]
Proceedings of the 10th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: ISI AS CR, 2006 - (Müllerová, I.), s. 57-58. ISBN 80-239-6285-X.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /10./. Skalský dvůr (CZ), 22.05.2006-26.05.2006]
R&D Projects: GA ČR GA102/04/2144
Institutional research plan: CEZ:AV0Z20650511
Keywords : SEM * detection * Everhart-Thornley
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experimental data describing signal processing in the E.-T. detector are presented. Results of a numerical model of the E.-T.detector are compared with the performance of a real detector.

The paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experimental data describing signal processing in the E.-T. detector are presented. Results of a numerical model of the E.-T.detector are compared with the performance of a real detector.
Permanent Link: http://hdl.handle.net/11104/0139516