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THE EFFECT OF THE USE OF DIFFERENT ELECTRODE MATERIALS FOR EDGE-PLASMA BIASING ON PLASMA DENSITY AND FLOATING POTENTIAL MODIFICATIONS
- 1.WEINZETTL, Vladimír, PIFFL, Vojtěch, MATĚJÍČEK, Jiří, DUFKOVÁ, Edita, ZAJAC, Jaromír, DEJARNAC, Renaud, PEŘINA, Vratislav. THE EFFECT OF THE USE OF DIFFERENT ELECTRODE MATERIALS FOR EDGE-PLASMA BIASING ON PLASMA DENSITY AND FLOATING POTENTIAL MODIFICATIONS. Czechoslovak Journal of Physics. 2005, 55(12), 1607-1614. ISSN 0011-4626.
Number of the records: 1