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Plasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering

  1. 1.
    SYSNO0025239
    TitlePlasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering
    TitleStudium plazmatu a depozice DLC/TiC/Ti multivrstevných struktur pomocí techniky kombinující pulsní laserovou depozici a magnetronové naprašování
    Author(s) Bulíř, Jiří (FZU-D) RID, ORCID, SAI
    Novotný, Michal (FZU-D) RID, ORCID, SAI
    Jelínek, Miroslav (FZU-D) RID, ORCID
    Kocourek, Tomáš (FZU-D) RID, ORCID, SAI
    Studnička, Václav (FZU-D) RID
    Source Title Surface and Coatings Technology. Roč. 200, - (2005), s. 708-711. - : Elsevier
    Document TypeČlánek v odborném periodiku
    Grant IAA1010110 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic
    GP106/02/P015 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
    LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    CEZAV0Z10100522 - FZU-D (2005-2011)
    Languageeng
    CountryCH
    Keywords pulsed laser deposition * magnetron * optical emission spectroscopy * x-ray diffraction * nanostructure
    Permanent Linkhttp://hdl.handle.net/11104/0115649
     
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