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Plasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering

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    SYSNO ASEP0025239
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JOstatní články
    TitlePlasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering
    TitleStudium plazmatu a depozice DLC/TiC/Ti multivrstevných struktur pomocí techniky kombinující pulsní laserovou depozici a magnetronové naprašování
    Author(s) Bulíř, Jiří (FZU-D) RID, ORCID, SAI
    Novotný, Michal (FZU-D) RID, ORCID, SAI
    Jelínek, Miroslav (FZU-D) RID, ORCID
    Kocourek, Tomáš (FZU-D) RID, ORCID, SAI
    Studnička, Václav (FZU-D) RID
    Source TitleSurface and Coatings Technology. - : Elsevier - ISSN 0257-8972
    Roč. 200, - (2005), s. 708-711
    Number of pages4 s.
    Languageeng - English
    CountryCH - Switzerland
    Keywordspulsed laser deposition ; magnetron ; optical emission spectroscopy ; x-ray diffraction ; nanostructure
    Subject RIVBL - Plasma and Gas Discharge Physics
    R&D ProjectsIAA1010110 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    GP106/02/P015 GA ČR - Czech Science Foundation (CSF)
    LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    CEZAV0Z10100522 - FZU-D (2005-2011)
    AnnotationWe prepared nanostructured composed of diamond-like carbon (DLC), titanium and titanium carbide using a new hybrid technique combining pulsed deposition (PLD) with magnetron sputtering
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2006
Number of the records: 1  

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