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Contribution to the application of the Langmuir probe techique for plasma monitoring in the Ar and n-hexane mixture plasma during the polymerisation process
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SYSNO ASEP 0024653 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Contribution to the application of the Langmuir probe techique for plasma monitoring in the Ar and n-hexane mixture plasma during the polymerisation process Title Příspěvek k aplikaci Langmuirovy sondy pro monitorování plasmy ze směsi Ar a n-hexanu během procesu polymerace Author(s) Adámek, P. (CZ)
Kalčík, J. (CZ)
Šícha, M. (CZ)
Tichý, M. (CZ)
Biederman, H. (CZ)
Soukup, Ladislav (FZU-D)
Jastrabík, Lubomír (FZU-D) RID, ORCIDSource Title Czechoslovak Journal of Physics. - : Springer - ISSN 0011-4626
Roč. 49, č. 12 (1999), s. 1685-1700Number of pages 6 s. Language eng - English Country CZ - Czech Republic Keywords Langmuir probe ; plasma monitoring ; average energy of electrons ; polymerisation process Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects OC 516.50 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA202/97/1011 GA ČR - Czech Science Foundation (CSF) GA202/98/0116 GA ČR - Czech Science Foundation (CSF) GA202/98/0666 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z1010914 - FZU-D Annotation The experimentally obtained probe characteristics were used to determine the density and the average energy of electrons. In the DC magnetron stainless steel reactor the electron average energy in the Ar and n-hexane mixture plasma was about one order of magnitude smaller than in the case in which the working gas inside the reactor was the pure Ar. The probe measurements in the magnetron reactor were supplemented by the experiment in the customary glass discharge tube with a hollow cathode Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2006
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