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Ultrafast infrared laser crystallization of amorphous Si/Ge multilayer structures
- 1.BULGAKOV, A., BERÁNEK, J., VOLODIN, V.A., CHENG, Y., LEVY, Y., NAGISETTY, S.S., ZUKERSTEIN, M., POPOV, A. A., BULGAKOVA, N. M. Ultrafast infrared laser crystallization of amorphous Si/Ge multilayer structures. Materials. 2023, 16(9), 3572. E-ISSN 1996-1944. Available: doi: 10.3390/ma16093572.
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