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Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon
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SYSNO ASEP 0570669 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon Author(s) Weiss, Zdeněk (FZU-D) ORCID
Ashcheulov, Petr (FZU-D) ORCID, RID
Lambert, Nicolas (FZU-D) ORCID, RID
Taylor, Andrew (FZU-D) RID, ORCID
Lorinčik, J. (CZ)
Sung, Kil-dong (FZU-D)
Davydova, Marina (FZU-D) RID, ORCID
Mortet, Vincent (FZU-D) RID, ORCIDNumber of authors 8 Article number 111890 Source Title Vacuum. - : Elsevier - ISSN 0042-207X
Roč. 210, April (2023)Number of pages 8 s. Language eng - English Country GB - United Kingdom Keywords diamond ; glow discharge optical emission spectroscopy ; boron ; phosphorus ; argon ; neon Subject RIV BL - Plasma and Gas Discharge Physics OECD category Analytical chemistry R&D Projects GA20-03187S GA ČR - Czech Science Foundation (CSF) GA21-03538S GA ČR - Czech Science Foundation (CSF) EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access with time embargo (01.04.2025) Institutional support FZU-D - RVO:68378271 UT WOS 000946831300001 EID SCOPUS 85147842748 DOI 10.1016/j.vacuum.2023.111890 Annotation Boron- and phosphorus-doped diamond layers were analysed by glow discharge optical emission spectroscopy. A methodology for quantitative depth profiling of layers was developed, based on multi-matrix calibration with a calibration model assuming matrix-independent emission yields. Factors affecting accuracy and sensitivity of analysis are discussed. Analysis of boron with the B I line at 208.959 nm yielded a satisfactory performance. Analysis of phosphorus with the P I line at 178.284 nm in an argon glow discharge is affected by an argon-related interference, which can be avoided by using a neon discharge. The use of which leads to an eightfold improvement in the phosphorus detection limit. A light interference effect affecting the analysis in transparent layers is described, indicating that layers are transparent far into the ultraviolet region. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2024 Electronic address https://doi.org/10.1016/j.vacuum.2023.111890
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