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Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon

  1. 1.
    Weiss, Zdeněk - Ashcheulov, Petr - Lambert, Nicolas - Taylor, Andrew - Lorinčik, J. - Sung, Kil-dong - Davydova, Marina - Mortet, Vincent
    Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon.
    Vacuum. Roč. 210, April (2023), č. článku 111890. ISSN 0042-207X. E-ISSN 1879-2715
    OECD category: Analytical chemistry
    Impact factor: 4, year: 2022
    Method of publishing: Open access with time embargo
    https://doi.org/10.1016/j.vacuum.2023.111890
    https://hdl.handle.net/11104/0342000
Number of the records: 1  

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