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Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon
- 1.Weiss, Z., Ashcheulov, P., Lambert, N., Taylor, A., Lorinčik, J., Sung, K.-d., Davydova, M., Mortet, V. Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon. Vacuum. 2023, 210(April), 111890. ISSN 0042-207X. E-ISSN 1879-2715. Available: doi: 10.1016/j.vacuum.2023.111890.
Number of the records: 1