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Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon

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    WEISS, Z., ASHCHEULOV, P., LAMBERT, N., TAYLOR, A., LORINČIK, J., SUNG, K.-d., DAVYDOVA, M., MORTET, V. Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon. Vacuum. 2023, 210(April), 111890. ISSN 0042-207X. E-ISSN 1879-2715. Available: doi: 10.1016/j.vacuum.2023.111890.
Number of the records: 1  

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