Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon

WEISS, Zdeněk, ASHCHEULOV, Petr, LAMBERT, Nicolas, TAYLOR, Andrew, LORINČIK, J., SUNG, Kil-dong, DAVYDOVA, Marina, MORTET, Vincent. Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon. Vacuum. 2023, 210(April), 111890. ISSN 0042-207X. E-ISSN 1879-2715. Available: doi: 10.1016/j.vacuum.2023.111890.