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V-pits formation in InGaN/GaN: influence of threading dislocations and indium content

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    0556260 - FZÚ 2023 RIV GB eng J - Journal Article
    Stránská Matějová, J. - Hospodková, Alice - Košutová, T. - Hubáček, Tomáš - Hývl, Matěj - Holý, V.
    V-pits formation in InGaN/GaN: influence of threading dislocations and indium content.
    Journal of Physics D-Applied Physics. Roč. 55, č. 25 (2022), č. článku 255101. ISSN 0022-3727. E-ISSN 1361-6463
    R&D Projects: GA MŠMT(CZ) LTAIN19163; GA MŠMT EF16_026/0008382
    Grant - others:OP VVV - CARAT CZ.02.1.01/0.0/0.0/16_026/0008382
    Research Infrastructure: CzechNanoLab - 90110
    Institutional support: RVO:68378271
    Keywords : V-pits * InGaN/GaN * dislocations * x-ray diffraction * diffuse scattering * XRD * RSM
    OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
    Impact factor: 3.4, year: 2022
    Method of publishing: Open access with time embargo
    Result website:
    https://doi.org/10.1088/1361-6463/ac5c1a
    DOI: https://doi.org/10.1088/1361-6463/ac5c1a

    Two sets of InGaN/GaN MOVPE-grown samples were studied by high-resolution x-ray diffraction techniques together with statistical analysis of atomic force microscope images in order to determine the impact of In concentration and threading dislocations (TDs) density on the V-pit formation. It was shown that in our samples, the density of V-pits in the epilayer matched the TD density with a screw component in the substrate. Pure edge TDs do not affect the V-pit density. The In concentration influences the size of the V-pits, but not their density.

    Permanent Link: http://hdl.handle.net/11104/0330551

     
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