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Surface treatment of ZnO microrods by the inductively coupled hydrogen plasma with self-biased holder
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SYSNO ASEP 0549951 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Surface treatment of ZnO microrods by the inductively coupled hydrogen plasma with self-biased holder Author(s) Remeš, Zdeněk (FZU-D) RID, ORCID
Buryi, Maksym (FZU-D) RID, ORCID
Sharma, Dhananjay K. (FZU-D) ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Potocký, Štěpán (FZU-D) RID, ORCID
Shagieva, Ekaterina (FZU-D) ORCID
Poruba, A. (CZ)
Mičová, J. (SK)Number of authors 8 Source Title Proceedings of ADEPT - ADEPT 2021. - Žilina : University of Žilina, 2021 / Jandura D. ; Maniaková P. ; Lettrichová I. ; Kováč, jr. J. - ISBN 978-80-554-1806-3 Pages s. 37-40 Number of pages 4 s. Publication form Online - E Action 9th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2021 Event date 20.09.2021 - 23.09.2021 VEvent location Podbanské Country SK - Slovakia Event type EUR Language eng - English Country SK - Slovakia Keywords surface ; hydrogen ; plasma ; ZnO ; Raman scattering ; photoluminescence Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GC19-02858J GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Annotation Inductively coupled plasma (ICP) operating at the radio frequency (RF) of 13.56 MHz has been used as a low-pressure treatment method providing further adjustment of surface properties. We elucidate the role of the self-bias of the substrate holder on optical properties of a ZnO surface exposed to hydrogen plasma. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022
Number of the records: 1