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Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation
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SYSNO ASEP 0540252 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation Author(s) Milov, I. (NL)
Zhakhovsky, V. (RU)
Ilnitsky, D. (RU)
Migdal, K. (RU)
Khokhlov, V. (RU)
Petrov, Y. (RU)
Inogamov, N. (RU)
Lipp, V. (DE)
Medvedev, Nikita (UFP-V) ORCID
Ziaja, B. (DE)
Medvedev, V. (RU)
Makhotkin, I.A. (NL)
Louis, E. (NL)
Bijkerk, F. (NL)Number of authors 14 Article number 146952 Source Title Applied Surface Science. - : Elsevier - ISSN 0169-4332
Roč. 528, October (2020), s. 1-18Number of pages 18 s. Language eng - English Country NL - Netherlands Keywords Extreme ultraviolet ; Femtosecond laser ablation ; Free-electron laser ; Molecular dynamics ; Monte Carlo ; Thin films Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects LTT17015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LM2015083 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support UFP-V - RVO:61389021 UT WOS 000576740200009 EID SCOPUS 85087332352 DOI 10.1016/j.apsusc.2020.146952 Annotation The dynamics of a thin ruthenium film irradiated by femtosecond extreme UV laser pulses is studied with a hybrid computational approach, which includes Monte Carlo, two-temperature hydrodynamics and molecular dynamics models. This approach is capable of accurate simulations of all stages of material evolution induced by extreme UV or X-ray photons: from nonequilibrium electron kinetics till complete lattice relaxation. We found that fast energy deposition in a subsurface layer leads to a two-level ablation: the top thin layer is ablated as a gas–liquid mixture due to expansion of overheated material at near and above critical conditions, whereas a thicker liquid layer below is ablated via a cavitation process. The latter occurs due to a thermo-mechanically induced tensile pressure wave. The liquid ablating layer exhibits unstable behaviour and disintegrates into droplets soon after detachment from the rest of the target. Our simulations reveal basic processes leading to formation of specific surface morphologies outside and inside the damage craters. The calculated ablation threshold, crater depth and morphological features are in quantitative agreement with the experimental data, which justifies the applicability of our hybrid model to study laser-induced material damage. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2021 Electronic address https://www.sciencedirect.com/science/article/pii/S0169433220317098?via%3Dihub
Number of the records: 1