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Statistical Coulomb interactions in multi-beam SEM
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SYSNO 0524976 Title Statistical Coulomb interactions in multi-beam SEM Author(s) Stopka, Jan (UPT-D) ORCID, SAI
Kruit, P. (NL)Source Title International Journal of Modern Physics. A. Roč. 34, č. 36 (2019) Article number 1942021 Document Type Článek v odborném periodiku Grant TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Language eng Country SG Keywords coulomb interactions * trajectory displacement * multi-beam SEM * electron optics * slice method URL https://www.worldscientific.com/doi/10.1142/S0217751X19420211 Permanent Link http://hdl.handle.net/11104/0309187
Number of the records: 1