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Creation and detection of electron vortex beams in a scanning electron microscope
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SYSNO ASEP 0510323 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Creation and detection of electron vortex beams in a scanning electron microscope Author(s) Řiháček, Tomáš (UPT-D) RID, ORCID
Mika, Filip (UPT-D) RID, SAI, ORCID
Horák, M. (CZ)
Schachinger, T. (AT)
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 7 Source Title Microscopy Conference: MC 2019. Abstracts. - Berlin : DSE, 2019
S. 409-410Number of pages 2 s. Publication form Online - E Action Microscopy Conference : MC 2019 Event date 01.09.2019 - 05.09.2019 VEvent location Berlin Country DE - Germany Event type WRD Language eng - English Country DE - Germany Keywords detection of electron vortex beams ; SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Nano-materials (production and properties) R&D Projects TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 Annotation Although knowledge on electron vortex beams (EVB) has significantly developed since their first experimental observation, all experiments and applications have been considered almost solely in the (scanning) transmission electron microscope ((S)TEM). Our aim is to apply this tool in the scanning electron microscope (SEM).
Determining the probe structure in SEM is rather challenging task since there is no conventional tool for visualizing the spot. Scanning over a sample, which consists of an appropriate contrasting pattern, and collecting secondary electrons (SE) can be used. Since the contrasting structure effectively serves as a detector, we further refer it as a detection structure (DS). To reach better resolution of the beam structure, dimensions of DS must be significantly
reduced. However, the measured signal decreases with diminishing surface area of DS. For small DS size and low current, this method does not provide a sufficiently strong signal.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2020
Number of the records: 1