Frontiers in magnetic resonance

0499912 - FZÚ 2019 RIV AE eng M - Monography Chapter
Kalabukhova, E. - Savchenko, Dariia (ed.) - Shanina, B.
Paramagnetic defects in amorphous hydrogenated silicon carbide and silicon carbonitride films.
Frontiers in magnetic resonance. Sharjah: Bentham Science Publishers Ltd., 2018 - (Savchenko, D.; Kassiba, A.), s. 251-282. ISBN 978-1-68108-694-1
Institutional support: RVO:68378271
Keywords : amorphous hydrogenated carbon-rich silicon-carbon films * amorphous silicon carbonitride * annealing * anisotropy
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

In this chapter, the nature of the defects and their relation to the incorporation of carbon, hydrogen, nitrogen and thermal treatment were investigated by electron paramagnetic resonance (EPR) spectroscopy for the fundamental insight of the electronic, optical and magnetic characteristics of the amorphous hydrogenated carbonrich silicon-carbon (a-Si1-xCx:H) and amorphous silicon carbonitride (a-SiCxNy) thin films. The paramagnetic defects due to the silicon dangling bonds (SiDBs), carbonrelated defects (CRDs) and K-center with Si-N2Si configuration were revealed in a-Si1-xCx:H films. The observed strong rise of the CRD spin density in annealed a-Si1-xCx:H films is caused by the hydrogen effusion process that takes place at Tann > 400°C.

Permanent Link: http://hdl.handle.net/11104/0292102