Number of the records: 1
Measurement of coherence properties of scanning electron microscope
- 1.
SYSNO ASEP 0431335 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Measurement of coherence properties of scanning electron microscope Author(s) Řiháček, Tomáš (UPT-D) RID, ORCID
Lenc, M. (CZ)
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 3 Source Title 9th International Conference on Charged Particle Optics. Book of Abstracts. - Brno : Institute of Scientific Instruments AS CR, v. v. i, 2014 - ISBN 978-80-87441-11-4
S. 65Number of pages 1 s. Publication form Print - P Action International Conference on Charged Parrticle Optics /9./ Event date 31.08.2014-05.09.2014 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords coherence ; diffraction ; scanning electron microscope Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 Annotation Coherence of an electron beam is an important characteristic in the transmission electron microscope. It can be determined through the visibility of interference fringes in a diffraction pattern. On the other hand, the coherence of the beam is not usually important for the standard applications of a scanning electron microscope (SEM). Nevertheless it can be of importance for some specific cases. We make use of the experimental setup similar to that used in [1]. The arrangement is shown in Fig. 1, where the diffraction grating is approximately translationally invariant with respect to the both transverse directions. In the interpretation of diffraction pattern we consider the effect of both non-vanishing source size and finite energy spread of the electron beam. The chromatic aberration of the objective lens is taken into account as well. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2015
Number of the records: 1