Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes

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SYSNO	0424263
Title	Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes
Author(s)	Potocký, Štěpán (FZU-D)_{RID, ORCID} Čada, Martin (FZU-D)_{RID, ORCID, SAI} Babchenko, Oleg (FZU-D)_{RID, ORCID} Ižák, Tibor (FZU-D)_RID Davydova, Marina (FZU-D)_{RID, ORCID} Rezek, Bohuslav (FZU-D)_{RID, ORCID} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	537. WE Heraeus Seminar. Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends. S. 75-76. - Dresden : Wilhelm und Else Heraeus-Stiftung, 2013 / Gemming S. ; Abrasonis G. ; Vinnichenko M.
Conference	WE-Heraeus-Seminar /537./ - Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends, Dresden, 26.06.2013-28.06.2013
Document Type	Abstrakt
Grant	TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LM2011026 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	GAP205/12/0908 GA ČR - Czech Science Foundation (CSF)
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	DE
Keywords	microwave plasma * CVD deposition
Permanent Link	http://hdl.handle.net/11104/0230378

Number of the records: 1