0372559 - ÚPT 2012 RIV PL eng J - Journal Article
Lazar, Josef - Hrabina, Jan - Šerý, Mojmír - Klapetek, P. - Číp, Ondřej
Multiaxis interferometric displacement measurement for local probe microscopy.
Central European Journal of Physics. Roč. 10, č. 1 (2012), s. 225-231. ISSN 1895-1082. E-ISSN 1644-3608
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276
Institutional research plan: CEZ:AV0Z20650511
Keywords : interferometry * nanometrology * microscopy
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 0.905, year: 2012 ; AIS: 0.257, rok: 2012
DOI: https://doi.org/10.2478/s11534-011-0093-5

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Permanent Link: http://hdl.handle.net/11104/0205851