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Lithographically defined metal surfaces; modifications and applications
- 1.0326771 - ÚIACH 2010 ES eng A - Abstract
Jusková, Petra - Ostatná, Veronika - Paleček, Emil - Foret, František
Lithographically defined metal surfaces; modifications and applications.
[Litograficky definované kovové povrchy, modifikace a aplikace.]
Biological Surfaces and Interfaces, ESF-EMBO Symposium. 2009.
[ESF-EMBO Symposium, Biological Surfaces and Interfaces. 27.06.2009-02.07.2009, Sant Feliu de Guixols]
R&D Projects: GA ČR(CZ) GA203/06/1685; GA ČR GA301/07/0490; GA AV ČR KAN400310651
Institutional research plan: CEZ:AV0Z40310501; CEZ:AV0Z50040507; CEZ:AV0Z50040702
Keywords : magnetic particles * lithography
Subject RIV: CB - Analytical Chemistry, Separation
Vacuum metal deposition and photolithography was applied to prepare metal structures with well-defined, reproducible and regular geometry.
Vakuové naprašování a fotolitografie byly využity k přípravě kovových struktur s přesně definovanou, reprodukovatelnou a pravidelnou geometrií.
Permanent Link: http://hdl.handle.net/11104/0173773
Number of the records: 1