Number of the records: 1
3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope
- 1.
SYSNO ASEP 0205675 Document Type K - Proceedings Paper (Czech conf.) R&D Document Type The record was not marked in the RIV Title 3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope Author(s) Neděla, Vilém (UPT-D) RID, ORCID, SAI Source Title 4. ročník přehlídky doktorských prací Elektrotechnika a informatika 2003. - Plzeň : Západočeská univerzita v Plzni, 2003 - ISBN 80-7082-993-1
s. 96 - 99Number of pages 4 s. Action Elektrotechnika a informatika 2003 Event date 15.10.2003-16.10.2003 VEvent location Nečtiny Country CZ - Czech Republic Event type CST Language eng - English Country CZ - Czech Republic Keywords 3D view ; detector board ; ESEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/01/1271 GA ČR - Czech Science Foundation (CSF) IBS2065107 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z2065902 - UPT-D Annotation This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2004
Number of the records: 1