Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths

0567078 - FZÚ 2024 RIV US eng J - Journal Article
Kapran, Anna - Antunes, V.G. - Hubička, Zdeněk - Ballage, C. - Minea, T.
Investigation of the magnetron balancing effect on the ionized flux fraction and deposition rate of sputtered titanium species for the high-power impulse magnetron sputtering pulses of different lengths.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 41, č. 1 (2023), č. článku 013003. ISSN 0734-2101. E-ISSN 1520-8559
R&D Projects: GA ČR(CZ) GA21-04477S; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : HiPIMS * magnetron * ionized flux fraction * unbalanced magnetic field
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.9, year: 2022
Method of publishing: Limited access
https://doi.org/10.1116/6.0002309

The study is focused on the impact of different magnetic field configurations of a high-power impulse magnetron sputtering (HiPIMS) in a nonreactive mode on the film precursors. Ionized flux fraction and total flux deposited onto the substrate were measured with the magnetic quartz crystal microbalance probe placed in front of the target racetrack. Particularly, we investigated the degree of magnetron balancing and the geometry of the magnetic field above the Ti target surface (4 in. diameter), as crucial factors influencing the thin film deposition, for different HiPIMS pulse lengths. Three unbalanced (II type) magnetron configurations have been chosen for this study: two symmetric geometries—with a regular magnetic field (B parallel to the target about 80 and 35 mT) and one asymmetric (highly unbalanced) magnetron configuration with an intermediate magnetic field (B parallel to the target about 48 mT).
Permanent Link: https://hdl.handle.net/11104/0342037