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Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N.sub.2./sub. and Ar + O.sub.2./sub. gas mixtures
- 1.0564937 - FZÚ 2023 RIV DE eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N2 and Ar + O2 gas mixtures.
European Physical Journal D. Roč. 76, č. 11 (2022), č. článku 214. ISSN 1434-6060. E-ISSN 1434-6079
R&D Projects: GA ČR(CZ) GA21-04477S; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : plasma jet * plasma sputtering * ion * oxygen * nitrogen
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 1.8, year: 2022
Method of publishing: Open access
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N2 or Ar + O2 gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar+ and Ar2+ ions and molecular N2+ or O2+ ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
Permanent Link: https://hdl.handle.net/11104/0336517
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