Number of the records: 1  

Long-term changes in Al thin-film extreme ultraviolet filters

  1. 1.
    SYSNO ASEP0550989
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JČlánek ve WOS
    TitleLong-term changes in Al thin-film extreme ultraviolet filters
    Author(s) Schmidt, Jiří (UFP-V) RID
    Koláček, Karel (UFP-V) RID
    Frolov, Oleksandr (UFP-V) RID
    Štraus, Jaroslav (UFP-V) RID
    Hoffer, Petr (UFP-V) RID
    Stelmashuk, Vitaliy (UFP-V) RID
    Tuholukov, Andrii (UFP-V)
    Jiříček, Petr (FZU-D) RID, ORCID, SAI
    Houdková, Jana (FZU-D) RID, ORCID
    Number of authors9
    Source TitleApplied Optics . - : Optical Society of America - ISSN 1559-128X
    Roč. 60, č. 28 (2021), s. 8766-8773
    Number of pages8 s.
    Languageeng - English
    CountryUS - United States
    KeywordsAl thin-film ; extreme ultraviolet filters ; Al2O3
    Subject RIVBH - Optics, Masers, Lasers
    OECD categoryOptics (including laser optics and quantum optics)
    Subject RIV - cooperationInstitute of Physics - Optics, Masers, Lasers
    R&D ProjectsLTC20061 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    LTT17015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    GA18-12386S GA ČR - Czech Science Foundation (CSF)
    Method of publishingLimited access
    Institutional supportUFP-V - RVO:61389021 ; FZU-D - RVO:68378271
    UT WOS000704359000016
    EID SCOPUS85115753272
    DOI10.1364/AO.432592
    AnnotationThin-film Al filters are very popular owing to their high transmittance in the wavelength range of 17–67 nm and low transmittance in the visible and near-UV regions, however, they are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material - therefore, they strongly influence the total transmittance of the filter. This paper not only provides the transmittance of very old Al filters but also maps the transmittance development of Al filters over two years since their delivery (in 2016) in an uncontrolled atmosphere.
    WorkplaceInstitute of Plasma Physics
    ContactVladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975
    Year of Publishing2022
    Electronic addresshttps://www.osapublishing.org/ao/abstract.cfm?uri=ao-60-28-8766
Number of the records: 1  

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