Changes of morphological, optical and electrical properties induced by hydrogen plasma on (0001) ZnO surface

0548925 - FZÚ 2023 RIV DE eng J - Journal Article
Remeš, Zdeněk - Artemenko, Anna - Ukraintsev, Egor - Sharma, Dhananjay K. - Buryi, Maksym - Kromka, Alexander - Potocký, Štěpán - Szabó, Ondrej - Kuliček, J. - Rezek, B. - Poruba, A. - Míčová, J. - Shu Hsu, H.
Changes of morphological, optical and electrical properties induced by hydrogen plasma on (0001) ZnO surface.
Physica Status Solidi A. Roč. 219, č. 16 (2022), č. článku 2100427. ISSN 1862-6300. E-ISSN 1862-6319
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GC19-02858J
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) SAV-21-09; AV ČR(CZ) StrategieAV21/6
Program: Bilaterální spolupráce; StrategieAV
Research Infrastructure: CzechNanoLab - 90110
Institutional support: RVO:68378271
Keywords : ZnO * plasma * XPS * AFM * PL
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 2, year: 2022
Method of publishing: Open access with time embargo
https://doi.org/10.1002/pssa.202100427

Plasma provides specific adjustment of solid-state surface properties offering an alternative to high temperature treatment. In this work, hydrogen plasma treatment of monocrystalline (0001) ZnO surface is studied in an inductively coupled plasma (ICP) reactor with reduced capacitively coupled plasma mode. We explain the crucial role of electrical grounding of the sample holder for plasma etching and related changes in the morphology, optical and electrical properties of surfaces exposed to electron and ion bombardment. The effects on the chemical composition of the surface are analyzed by (XPS), optical properties by photoluminescence spectroscopy, topography, roughness and surface potential by atomic force microscopy (AFM) and Kelvin probe force microscopy (KPFM). All methods show altered ZnO surface properties before and after plasma treatment strongly depending on the electrical potential of the holder.
Permanent Link: https://hdl.handle.net/11104/0334158