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Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection

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    0538978 - FZÚ 2021 RIV US eng J - Journal Article
    Hofmann, S. - Lejček, Pavel - Zhou, G. - Yang, H. - Lian, S.Y. - Kovač, J. - Wang, J.Y.
    Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection.
    Journal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics. Roč. 38, č. 3 (2020), s. 1-7, č. článku 034010. ISSN 2166-2746. E-ISSN 2166-2754
    Institutional support: RVO:68378271
    Keywords : SIMS * depth resolution * secondary clusters * MRI model
    OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
    Impact factor: 1.416, year: 2020
    Method of publishing: Limited access
    https://doi.org/10.1116/6.0000108

    The apparent improvement of the depth resolution in secondary ion mass spectrometry depth profiles using cluster secondary ions as compared to single ion profiles is explained on basis of an attractive interaction enhancing cluster formation.
    Permanent Link: http://hdl.handle.net/11104/0316709

     
     
Number of the records: 1  

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