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Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition.
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SYSNO ASEP 0507800 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition. Author(s) Dřínek, Vladislav (UCHP-M) RID, ORCID, SAI
Klementová, Mariana (FZU-D) RID, ORCID
Palatinus, Lukáš (FZU-D) RID, ORCID
Dytrych, Pavel (UCHP-M) RID, ORCID, SAI
Fajgar, Radek (UCHP-M) RID, ORCID, SAI
Jandová, Věra (UCHP-M) RID, ORCID, SAI
Koštejn, Martin (UCHP-M) RID, SAI, ORCID
Kupčík, Jaroslav (UCHP-M) RID, ORCID, SAIArticle number 151470 Source Title Journal of Alloys and Compounds. - : Elsevier - ISSN 0925-8388
Roč. 808, NOV 5 (2019)Number of pages 10 s. Language eng - English Country NL - Netherlands Keywords nanostructured materials ; nitride materials ; photoelectron microscopies ; vapor deposition Subject RIV CF - Physical ; Theoretical Chemistry OECD category Physical chemistry Subject RIV - cooperation Institute of Physics - Solid Matter Physics ; Magnetism R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Limited access Institutional support UCHP-M - RVO:67985858 ; FZU-D - RVO:68378271 UT WOS 000483694900070 EID SCOPUS 85070507497 DOI 10.1016/j.jallcom.2019.07.182 Annotation To support the trend of a new green energy introduction in economics it has become urgent nowadays that more available and cheaper materials would substitute noble and/or expensive materials (Au, Ag, Pt, Pd, Ga …). Therefore, we studied molybdenum oxynitride films due to their catalytic properties. Molybdenum oxynitride films were fabricated by sub-atmospheric chemical vapor deposition (SACVD). According to Raman spectroscopy, grown platelets possessed MoO3 structure up to 12 at. % NH3 in NH3/air mixture. With the increasing amount of NH3 in the reaction atmosphere (16–25 at. % NH3), the films became heterogeneous containing Mo4O11 and MoO2 suboxides. Nanostructures – nanorods, nanoribbons developed gradually at those samples with highest concentrations of NH3 in the atmosphere (25–33 at. % NH3) whose structure was built by blocks of corner-sharing Mo-octaedra separated by double layers of edge-sharing Mo-octaedra, which was revealed by Electron Diffraction Tomography (EDT). X-ray Photoelectron Spectroscopy (XPS), similarly to Raman spectroscopy, showed a gradual rise of molybdenum suboxides with NH3 increase in the atmosphere, which was indicated by the successive appearance of Mo6+ → Mo5+ → Mo4+ species. As N 1s XPS signal was fully overlapped by the Mo 3d5/2 one, a new procedure of a standard selected was used for the estimation of the nitrogen content in the films. This material was capable of reducing water under illumination as found by Cycling Votammetry (CV). Workplace Institute of Chemical Process Fundamentals Contact Eva Jirsová, jirsova@icpf.cas.cz, Tel.: 220 390 227 Year of Publishing 2020 Electronic address http://hdl.handle.net/11104/0301847
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