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Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition.
- 1.DŘÍNEK, V., KLEMENTOVÁ, M., PALATINUS, L., DYTRYCH, P., FAJGAR, R., JANDOVÁ, V., KOŠTEJN, M., KUPČÍK, J. Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition. Journal of Alloys and Compounds. 2019, 808(NOV 5), 151470. ISSN 0925-8388. E-ISSN 1873-4669. Available: doi: 10.1016/j.jallcom.2019.07.182.
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