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Determination of atomic boron concentration in heavily boron-doped diamond by Raman spectroscopy
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SYSNO ASEP 0504653 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Determination of atomic boron concentration in heavily boron-doped diamond by Raman spectroscopy Author(s) Mortet, Vincent (FZU-D) RID, ORCID
Vlčková Živcová, Zuzana (UFCH-W) RID, ORCID
Taylor, Andrew (FZU-D) RID, ORCID
Davydova, Marina (FZU-D) RID, ORCID
Frank, Otakar (UFCH-W) RID, ORCID
Hubík, Pavel (FZU-D) RID, ORCID
Lorinčík, J. (CZ)
Aleshin, M. (CZ)Number of authors 8 Source Title Diamond and Related Materials. - : Elsevier - ISSN 0925-9635
Roč. 93, Mar (2019), s. 54-58Number of pages 5 s. Language eng - English Country CH - Switzerland Keywords diamond ; boron doping ; Raman spectroscopy ; Fano effect Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) Subject RIV - cooperation J. Heyrovsky Institute of Physical Chemistry - Physical ; Theoretical Chemistry R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA17-05259S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 ; UFCH-W - RVO:61388955 UT WOS 000464627200008 EID SCOPUS 85061043448 DOI 10.1016/j.diamond.2019.01.028 Annotation Raman spectroscopy has been foreseen as a simple and non-destructive characterization method to determine the boron concentration in heavily boron-doped diamond with metallic conductivity. However, currently available empirical studies are not fully satisfactory for enabling accurate determination of the boron concentration in diamond. Here, we study Raman spectra of epitaxial boron-doped diamond as a function of the boron concentration and the excitation wavelength. The zone center phonon and the phonon density of state maximum (at ca. 1200cm−1) lines are analyzed using a decoupled double Fano-function. This analysis method accurately describes the observed variation of the asymmetric parameters with atomic boron concentration and the photon excitation energy and enables the determination of the atomic boron concentration from the parameters of the examined Raman lines. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2020 Electronic address https://doi.org/10.1016/j.diamond.2019.01.028
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