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Quantitative comparison of simulated and measured signals in the STEM mode of a SEM
- 1.WALKER, C., KONVALINA, I., MIKA, F., FRANK, L., MÜLLEROVÁ, I. Quantitative comparison of simulated and measured signals in the STEM mode of a SEM. Nuclear Instruments & Methods in Physics Research Section B. 2018, 415(JAN), 17-24. ISSN 0168-583X. E-ISSN 1872-9584. Available: doi: 10.1016/j.nimb.2017.10.034
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