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SEM without black rectangles?
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SYSNO ASEP 0481331 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title SEM without black rectangles? Author(s) Frank, Luděk (UPT-D) RID, SAI, ORCID
Mikmeková, Eliška (UPT-D) RIDNumber of authors 2 Source Title Mikroskopie 2017. - Praha : Československá mikroskopická společnost, 2017
S. 20-21Number of pages 2 s. Publication form Print - P Action Mikroskopie 2017 Event date 09.05.2017 - 10.05.2017 VEvent location Bratislava Country SK - Slovakia Event type EUR Language eng - English Country CZ - Czech Republic Keywords SEM ; EBID of carbon ; graphene Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Coating and films R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 Annotation Electron-beam-induced deposition (EBID) of various materials from suitable precursors represents an established branch of nanotechnology. A specific alternative is carbon deposition on the basis of hydrocarbons as precursors that has been applied to grow various nanostructures. Our area of study is unintentional EBID of carbon from spontaneously adsorbed hydrocarbon molecules. This process traditionally constitutes a challenge for SEM practice preventing one from performing any true surface studies outside an ultrahigh vacuum and without in-situ cleaning of samples. And even more, creation of black rectangles as traces of previous observation is obstructive when acquiring micrographs for presentations. However, we have shown that when reducing the energy of irradiating electrons sufficiently, the EBID can be converted to e-beam-induced release (or electron stimulated desorption, ESD) causing removal of hydrocarbons and ultimate cleaning of surfaces in both an ultrahigh and a standard high vacuum. Using series of experiments with graphene samples, we demonstrate fundamental features of the ESD and present results of checks for possible radiation damage using Raman spectroscopy that led to optimisation of the electron energy for damage-free cleaning. Removal of the amorphous carbon layer has also been evidenced by photoelectron spectroscopy and electron diffraction. The method of preventing carbon contamination described here paves the way for greatly enhanced surface sensitivity of imaging and substantially reduced demands on vacuum systems for nanotechnological applications. Moreover, it brings an efficient tool making easier the everyday job of microscopists. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2018
Number of the records: 1