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Difraction in a scanning electron microscopie
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SYSNO ASEP 0460211 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Difraction in a scanning electron microscopie Author(s) Řiháček, Tomáš (UPT-D) RID, ORCID
Mika, Filip (UPT-D) RID, SAI, ORCID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments CAS, 2016 / Mika Filip - ISBN 978-80-87441-17-6 Pages s. 56-57 Number of pages 2 s. Publication form Print - P Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./ Event date 29.05.2016 - 03.06.2016 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords electron microscopy ; TEM ; STEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000391254000025 Annotation Manipulation with the primary beam phase in a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) has drawn significant attention in the microscopy community in the recent years. Although a few applications were found long before, some are still subjects of a future research. One of them is the use of electron vortex beams, which has very promising potential. It ranges from probing magnetic materials and manipulating with nanoparticles to spin polarization of a beam in an electron microscope.
The methods for producing electron vortex beams have undergone a lot of development in recent years as well. The most versatile way is holographic reconstruction using computer-generated holograms modifying either phase or amplitude. As the method is
based on diffraction, beam coherence is a very important parameter here. It is usually performed in TEM at energies of about 100 – 300 keV which are well suited for diffraction on artificial structures for two reasons. The coherence of the primary beam is often reasonable, and the diffraction pattern is easily observed. This is however not the case for a standard scanning electron microscope (SEM) with typical energy up to 30 keV.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2017 Electronic address http://www.trends.isibrno.cz/
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