Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Lazar, Josef; Klapetek, P.; Valtr, M.; Hrabina, Jan; Buchta, Zdeněk; Číp, Ondřej; Čížek, Martin; Oulehla, Jindřich; Šerý, Mojmír

doi:https://dx.doi.org/10.3390/s140100877

Number of the records: 1

Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

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SYSNO ASEP	0444439
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
Author(s)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Klapetek, P. (CZ) Valtr, M. (CZ) Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Buchta, Zdeněk (UPT-D)_{RID, SAI, ORCID} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Oulehla, Jindřich (UPT-D)_{RID, ORCID, SAI} Šerý, Mojmír (UPT-D)_{RID, SAI}
Number of authors	9
Source Title	Sensors. - : MDPI Roč. 14, č. 1 (2014), s. 877-886
Number of pages	10 s.
Publication form	Print - P
Language	eng - English
Country	CH - Switzerland
Keywords	nanometrology ; nanopositioning interferometry ; AFM ; nanoscale
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	GPP102/11/P820 GA ČR - Czech Science Foundation (CSF)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	EE2.4.31.0016 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	TA02010711 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
UT WOS	000336039100048
EID SCOPUS	84891845308
DOI	10.3390/s140100877
Annotation	We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 x 200 x 10) mu m. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2016

Number of the records: 1