Langmuir probe diagnostics of a plasma jet system

Tichý, M.; Hubička, Zdeněk; Šícha, Miloš; Čada, Martin; Olejníček, Jiří; Churpita, Olexandr; Jastrabík, Lubomír; Virostko, Petr; Adámek, Petr; Kudrna, Pavel; Leshkov, S.; Chichina, Mariya; Kment, Štěpán

doi:https://dx.doi.org/10.1088/0963-0252/18/1/014009

Number of the records: 1

Langmuir probe diagnostics of a plasma jet system

1.

SYSNO ASEP	0325016
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Langmuir probe diagnostics of a plasma jet system
Title	Diagnostika plazmového tryskového systému pomocí Langmuirovské sondy
Author(s)	Tichý, M. (CZ) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Šícha, Miloš (FZU-D) Čada, Martin (FZU-D)_{RID, ORCID, SAI} Olejníček, Jiří (FZU-D)_{RID, ORCID} Churpita, Olexandr (FZU-D)_{RID, ORCID} Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Virostko, Petr (FZU-D) Adámek, Petr (FZU-D)_{RID, ORCID} Kudrna, Pavel (FZU-D) Leshkov, S. (CZ) Chichina, Mariya (FZU-D) Kment, Štěpán (FZU-D)_{RID, ORCID}
Source Title	Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252 Roč. 18, č. 1 (2009), 014009/1-014009/11
Number of pages	11 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	Langmuir probe ; plasma jet ; deposition
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000262897600011
DOI	10.1088/0963-0252/18/1/014009
Annotation	Selected recent results on the application of Langmuir probes to diagnose plasma jet systems are presented. To demonstrate the versatility of the Langmuir probe method we give examples of measurements of the spatial distribution of the plasma parameters as well as their temporal dependence in cases when the plasma jet system operates in a pulsed regime. A part of this paper is devoted to introducing the Langmuir probe technique, especially with regard to its application under conditions when collisions between the charged and neutral particles in the probe sheath cannot be neglected and when the electron energy distribution function in plasma cannot be approximated by a Maxwellian one. In the experimental part we present Langmuir probe measurement of low-pressure and atmospheric-pressure plasma jet systems that are currently used for experiments with deposition of materials with special properties.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2009

Number of the records: 1