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Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO.sub.x./sub. thin films
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SYSNO 0309887 Title Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiOx thin films Title Sondová diagnostika plazmového tryskového systému s efektem duté katody pro depozice tenkých vrstev TiOx. Author(s) Virostko, Petr (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Adámek, Petr (FZU-D) RID, ORCID
Kment, Štěpán (FZU-D) RID, ORCID
Tichý, M. (CZ)
Jastrabík, Lubomír (FZU-D) RID, ORCIDSource Title Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 527-533. - : Wiley Document Type Článek v odborném periodiku Grant KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic KAN400720701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/06/0776 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) AV0Z10100521 - FZU-D (2005-2011) Language eng Country DE Keywords hollow cathode * plasma jet * probe diagnostics * deposition of thin films Permanent Link http://hdl.handle.net/11104/0161906
Number of the records: 1