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Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO.sub.x./sub. thin films
- 1.0309887 - FZÚ 2009 RIV DE eng J - Journal Article
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Adámek, Petr - Kment, Štěpán - Tichý, M. - Jastrabík, Lubomír
Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiOx thin films.
[Sondová diagnostika plazmového tryskového systému s efektem duté katody pro depozice tenkých vrstev TiOx.]
Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 527-533. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522; CEZ:AV0Z10100521
Keywords : hollow cathode * plasma jet * probe diagnostics * deposition of thin films
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.250, year: 2008
Permanent Link: http://hdl.handle.net/11104/0161906
Number of the records: 1