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Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film
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$a Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film 215 $a 8 s. $c P 300 $a infrastruktura CANAM 463 -1
$1 001 cav_un_epca*0257338 $1 011 $a 0168-583X $e 1872-9584 $1 200 1 $a Nuclear Instruments & Methods in Physics Research Section B $v Roč. 538, MAY (2023), s. 123-130 $1 210 $c Elsevier 610 $a PMMA shrinkage 610 $a Ion beam lithography 610 $a Microstructuring 610 $a Diffraction grating 700 -1
$3 cav_un_auth*0361915 $a Romanenko $b Oleksandr V. $p UJF-V $i Oddělení neutronové fyziky $j Department of Neutron Physics $k ONF $w Research with Beams of Ions and Neutrons $y CZ $T Ústav jaderné fyziky AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0233927 $a Lavrentiev $b Vasyl $p UJF-V $i Oddělení neutronové fyziky $j Department of Neutron Physics $k ONF $w Research with Beams of Ions and Neutrons $T Ústav jaderné fyziky AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0424405 $a Borodkin $b Andrei $p URE-Y $i Vláknové lasery a nelineární optika $j Fiber Lasers and Non-Linear Optics $T Ústav fotoniky a elektroniky AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0107728 $a Havránek $b Vladimír $p UJF-V $i Oddělení neutronové fyziky $j Department of Neutron Physics $k ONF $w Research with Beams of Ions and Neutrons $T Ústav jaderné fyziky AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0100958 $a Macková $b Anna $p UJF-V $i Oddělení neutronové fyziky $j Department of Neutron Physics $k ONF $w Research with Beams of Ions and Neutrons $T Ústav jaderné fyziky AV ČR, v. v. i. 856 $u https://doi.org/10.1016/j.nimb.2023.02.001 $9 RIV
Number of the records: 1