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Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film
- 1.ROMANENKO, O. V., LAVRENTIEV, V., BORODKIN, A., HAVRÁNEK, V., MACKOVÁ, A. Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film. Nuclear Instruments & Methods in Physics Research Section B. 2023, 538(MAY), 123-130. ISSN 0168-583X. E-ISSN 1872-9584. Available: doi: 10.1016/j.nimb.2023.02.001.
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