Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond

Number of the records: 1

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SYSNO	0556046
Title	Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond
Author(s)	Mortet, Vincent (FZU-D)_{RID, ORCID} Taylor, Andrew (FZU-D)_{RID, ORCID} Davydova, Marina (FZU-D)_{RID, ORCID} Lamač, Marcel (FZU-D)_ORCID Lambert, Nicolas (FZU-D)_{ORCID, RID} Elantyev, I. (CZ) Lorinčík, J. (CZ) Troadec, D. (FR) Vronka, Marek (FZU-D)_{ORCID, RID} Potocký, Štěpán (FZU-D)_{RID, ORCID}
Corespondence/senior	Mortet, Vincent - Korespondující autor
Source Title	Diamond and Related Materials. Roč. 124, April (2022). - : Elsevier
Article number	108928
Document Type	Článek v odborném periodiku
Grant	CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	GA21-03538S GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	CH
Keywords	diamond * phosphorus doping * optical emission spectroscopy * PECVD
URL	https://doi.org/10.1016/j.diamond.2022.108928
Permanent Link	http://hdl.handle.net/11104/0330422

Number of the records: 1