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Round robin comparison study on the form measurement of optical freeform surfaces
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SYSNO ASEP 0541106 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Round robin comparison study on the form measurement of optical freeform surfaces Author(s) Fortmeier, I. (DE)
Schachtschneider, R. (DE)
Lédl, Vít (UFP-V) RID
Matoušek, Ondřej (UFP-V)
Siepmann, J. (DE)
Harsch, A. (DE)
Beisswanger, R. (DE)
Bitou, Y. (JP)
Kondo, Y. (JP)
Schulz, M. (DE)
Elster, C. (DE)Number of authors 11 Article number 2 Source Title Journal of the European Optical Society: Rapid publications. - : European optical society
Roč. 16, č. 1 (2020)Number of pages 15 s. Language eng - English Country GB - United Kingdom Keywords Freeform optical surfaces ; Interlaboratory comparison ; Metrology Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) Method of publishing Open access Institutional support UFP-V - RVO:61389021 UT WOS 000511497800001 EID SCOPUS 85077508507 DOI 10.1186/s41476-019-0124-1 Annotation A round robin comparison of freeform form measurements was carried out by the project partners and stakeholders of a European metrology research project. Altogether six measuring instruments were considered: five different (pointwise and areal) optical devices and one tactile device. Three optical freeform surfaces were used for the comparison measurements, where two specimens were measured by five instruments and one specimen by four instruments. In this paper, the evaluation methods and results of this round robin are presented for the three freeform surfaces made from a temperature-stable material, Super Invar ®. The freeforms had diameters of 40 mm, 50 mm and 100 mm and best-fit radii of 39.75 mm (convex), 40.9 mm (convex) and 423.5 mm (concave). For comparison, the bilateral pointwise differences between the available measurements were calculated. The root-mean-square values of these differences ranged from 15 nm to 110 nm (neglecting spherical contributions) and provided an insight into the status of typical freeform measurement capabilities for optical surfaces. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2021 Electronic address https://jeos.springeropen.com/track/pdf/10.1186/s41476-019-0124-1.pdf
Number of the records: 1