Front-side diamond deposition on the GaN membranes

Number of the records: 1

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SYSNO	0540751
Title	Front-side diamond deposition on the GaN membranes
Author(s)	Izsák, Tibor (FZU-D)_ORCID Vanko, G. (SK) Držík, M. (SK) Kasemann, S. (AT) Zehetner, J. (AT) Vojs, M. (SK) Zaťko, B. (SK) Potocký, Štěpán (FZU-D)_{RID, ORCID} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Proceedings of the 13th International Conference on Advanced Semiconductor Devices And Microsystems. S. 42-45. - New York : IEEE, 2020 / Vanko G. ; Izsák T.
Conference	International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /13./, 11.10.2020 - 14.10.2020, Smolenice
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	US
Keywords	diamond * GaN * CVD * stress
Permanent Link	http://hdl.handle.net/11104/0318357

Number of the records: 1