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Preparation of heterogenous copper-titanium oxides for chemiresistor applications
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SYSNO ASEP 0538349 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Preparation of heterogenous copper-titanium oxides for chemiresistor applications Author(s) Torrisi, A. (PL)
Horák, Pavel (UJF-V) RID, ORCID
Vacík, Jiří (UJF-V) RID, ORCID, SAI
Cannavó, Antonino (UJF-V) ORCID, SAI
Ceccio, Giovanni (UJF-V) ORCID, RID, SAI
Yatskiv, Roman (URE-Y) RID, ORCID
Kupčík, Jaroslav (UCHP-M) RID, ORCID, SAI
Fara, J. (CZ)
Fitl, P. (CZ)
Vlček, J. (CZ)
Vrňata, M. (CZ)Number of authors 11 Source Title Materials Today: Proceedings, 33. - Amsterdam : Elsevier, 2020 - ISSN 2214-7853 Pages s. 2512-2516 Number of pages 5 s. Publication form Print - P Action Symposium M on Metal Oxide- and Oxyhydride-Based Nanomaterials for Energy and Environment-Related Applications of the E-MRS Fall Meeting Event date 16.09.2019 - 19.09.2019 VEvent location Warsaw Country PL - Poland Event type EUR Language eng - English Country NL - Netherlands Keywords chemiresistors ; gas sensing ; P-n heterojuntions ; ion beam sputtering ; CuO ; TiO2 Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Nuclear physics Subject RIV - cooperation Institute of Radio Engineering and Electronics - Electronics ; Optoelectronics, Electrical Engineering
Institute of Chemical Process Fundamentals - Physical ; Theoretical ChemistryR&D Projects LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA19-02804S GA ČR - Czech Science Foundation (CSF) Institutional support UJF-V - RVO:61389005 ; URE-Y - RVO:67985882 ; UCHP-M - RVO:67985858 UT WOS 000599991700018 DOI 10.1016/j.matpr.2020.05.061 Annotation Metal oxide based gas sensors (MOS) found a wide application as modular parts in microelectronic devices due to their technological compatibility, low cost and outstanding sensing capabilities to different chemical species. The functionality of such chemiresistors consists of a change of the electric resistance/impedance of a semiconducting sensitive layer when gases with either oxidizing or reducing properties appear in the surrounding atmosphere. Earlier, the majority of the investigated chemiresistors were based on single phase, homogenous semiconductors. The combination of two different phases and hence the implementation of heterojunctions (HJs) on chemiresistors offers a way to increase the sensor performance, especially the sensitivity of the sensor. In this work, chemiresistors based on CuO-TiO2 acting as p-n heterojunction were developed. Thin sensitive layers were deposited by a two-step process. Cu Ti thin layers were prepared by ion beam sputtering using an Ar ion beam and, subsequently, oxidized by thermal annealing in air at 400 degrees C for 7 h. The stoichiometry of the metallic films was analyzed by the Rutherford Back-scattering (RBS) using 2 MeV alpha-particles. The gas sensing properties of the oxidic thin films (deposited on prefabricated substrates containing interdigital electrodes) were analyzed in an atmosphere containing 100 ppm of either methanol, hydrogen and acetaldehyde or 10.6 ppm of nitrogen dioxide. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2021
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