Number of the records: 1  

SMV-2017-23: Optimalizace nanolitografie

  1. 1.
    Jákl, Petr - Šerý, Mojmír
    SMV-2017-23: Optimalizace nanolitografie.
    [SMV-2017-23: Optimization of nanolitography.]
    Brno: Ústav experimentálnej fyziky SAV, 2017. 2 s.
    Source of funding: N - Non-public resources
    OECD category: Optics (including laser optics and quantum optics)
    http://hdl.handle.net/11104/0278450
Number of the records: 1  

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