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Measurements of current density distribution in shaped e-beam writers
- 1.BOK, Jan, HORÁČEK, Miroslav, KOLAŘÍK, Vladimír, URBÁNEK, Michal, MATĚJKA, Milan, KRZYŽÁNEK, Vladislav. Measurements of current density distribution in shaped e-beam writers. Microelectronic Engineering. 2016, 149(JAN 5), 117-124. ISSN 0167-9317. E-ISSN 1873-5568. Available: doi: 10.1016/j.mee.2015.09.013
Number of the records: 1