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Advanced interferometry systems for dimensional measurement in nanometrology
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SYSNO 0441274 Title Advanced interferometry systems for dimensional measurement in nanometrology Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Vychodil, M. (CZ)
Sedlář, P. (CZ)
Provazník, M. (CZ)Source Title Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). 94420P: 1-6. - Bellingham : SPIE, 2014 Conference Optics and Measurement Conference 2014 (OaM 2014), Liberec, 07.10.2014-10.10.2014 Document Type Konferenční příspěvek (zahraniční konf.) Grant GB14-36681G GA ČR - Czech Science Foundation (CSF) TA02010711 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TA01010995 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Language eng Country US Keywords interferometry * highly-coherent lasers * signal processing Permanent Link http://hdl.handle.net/11104/0246973
Number of the records: 1